A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

退換貨說明：

會員均享有10天的商品猶豫期（含例假日）。若您欲辦理退換貨，請於取得該商品10日內寄回。

辦理退換貨時，請保持商品全新狀態與完整包裝（商品本身、贈品、贈票、附件、內外包裝、保證書、隨貨文件等）一併寄回。若退回商品無法回復原狀者，可能影響退換貨權利之行使或須負擔部分費用。